Zobrazeno 1 - 10
of 21
pro vyhledávání: '"Ablative capillary discharge"'
Publikováno v:
In Vacuum 2003 71(1):229-232
Publikováno v:
Physics Letters A. 334:37-41
A modulated return conductor determines the wavelength of the m = 0 instability of the plasma column in an ablative capillary discharge and thus the number of active layers, in which population inversion of the n = 3 level of CVI is obtained by charg
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a0433b34a209ede507693b775e6cf1ae
https://doi.org/10.1016/j.physleta.2004.10.081
https://doi.org/10.1016/j.physleta.2004.10.081
Publikováno v:
Vacuum. 71:229-232
A study of the performance of an ablative capillary discharge through a PVC capillary is reported. It is shown that the PVC capillary is capable of producing strong in-band 13.5 nm EUV radiation. This band of radiation is produced by transition array
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5cd92f4487d91b353ee5b1ed9c2bc90d
https://doi.org/10.1016/s0042-207x(02)00742-x
https://doi.org/10.1016/s0042-207x(02)00742-x
Autor:
Pleslić, Sanda, Andreić, Željko
Capillary discharge as a pulsed discharge can be used as a source of extreme ultraviolet (EUV) radiation in new generation of lithographic technology, in extreme ultraviolet lithography (EUVL). It is important to investigate properties and possibilit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=57a035e5b1ae::04a9e9047a9f8b47e6398c632535e6cd
https://www.bib.irb.hr/450992
https://www.bib.irb.hr/450992
Autor:
Pleslić, Sanda
Ablative capillary discharges based on PVC with additives of tin, zinc and soot, and on polyacetal (CH2O)n were investigated. In PVC with additives of Sn and Zn, band radiation with a full-width at half-maximum of around 1 nm and maxima near 10, 13.5
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=57a035e5b1ae::1408b86d0fe237b163b6b818f4f4710a
https://www.bib.irb.hr/187631
https://www.bib.irb.hr/187631
A complete description of an ablative capillary discharge source emitting narrow band radiation at 13.5 nm is presented. The device is based on capillaries made of PVC with traces of Sn in the chemical additives used in the PVC production process. Th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e151157ec963b33ebc183d6a93703155
https://www.bib.irb.hr/187634
https://www.bib.irb.hr/187634
An XUV source that produces strong emission band at a wavelength of 13.5 nm with a FWHM of 0.6 nm and a duration of about 100 ns is described in this study. In particular this wavelength has attracted the attention of many scientists working in the f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5bf7b70d69b6b3a1a032d01d3a8e3756
https://www.bib.irb.hr/124116
https://www.bib.irb.hr/124116
Generation of narrow-band or line radiation in the EUV spectral region with radiation outside the band in question as low as possible is of great interest for technological applications. First results of a systematic study of the performance of an ab
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=57a035e5b1ae::70bbc051341bb1f5c1fdb481a767c1cc
https://www.bib.irb.hr/81963
https://www.bib.irb.hr/81963
The capillary discharge can be used as intense extreme ultraviolet (EUV) radiation source that produces a strong emission band at several wavelengths near 13.5 nm with FWHMs of about 1 nm and duration of approximately 100 ns. In particular this wavel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=57a035e5b1ae::3c75693c2db82f51b212fc60f60c449a
https://www.bib.irb.hr/124065
https://www.bib.irb.hr/124065
A systematic study of the performance of an ablative capillary discharge through a PVC capillary is reported. It is shown that the PVC capillary is capable of producing strong band of EUV radiation at or near the technologically very interesting wave
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=57a035e5b1ae::acd0ce34e1e973cc95b5a4a588b9dc8c
https://www.bib.irb.hr/124278
https://www.bib.irb.hr/124278