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High-dielectric-constant (high-k) materials are important as dielectric layers for computer processors to prevent unnecessary electrical current leakages. There is a fast-growing demand in the semiconductor industry for the exploration and integratio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::18d5a555867d382ca9bdf66291fd6793
https://doi.org/10.21203/rs.3.rs-1765020/v1
https://doi.org/10.21203/rs.3.rs-1765020/v1
Autor:
Abdul Hannan Yeo, Serine Soh Siew Boon, David Ho Soon Wee, Kalyn Lim Tien Shee, Wei Jun Qi, Zhang Kang, Kelvin Boh Tai Ming, Cheng Ting
Publikováno v:
2021 IEEE 23rd Electronics Packaging Technology Conference (EPTC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::471b582a3dddeb1183ae7161575a8a9e
https://doi.org/10.1109/eptc53413.2021.9663915
https://doi.org/10.1109/eptc53413.2021.9663915
