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pro vyhledávání: '"Abdellaoui, Amelie"'
Autor:
Abdellaoui, Amelie
Publikováno v:
Micro et nanotechnologies/Microélectronique. Université Paul Sabatier-Toulouse III, 2022. Français. ⟨NNT : 2022TOU30201⟩
National audience; Sensitive Ge-based sensors that convert infrared light in an electrical signal are developed at STMicroelectronics. For such applications, the current sequential integration flow need to be simplified to avoid tool contamination is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______4074::1869b65c6143d374afd9fec6a1044acb
https://theses.hal.science/tel-04132530
https://theses.hal.science/tel-04132530
