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of 3
pro vyhledávání: '"Aaron D. Shore"'
Autor:
Bing Dai, Harvey E. Berman, Steven B. Herschbein, Hyoung H. Kang, Carmelo F. Scrudato, Aaron D. Shore
Publikováno v:
International Symposium for Testing and Failure Analysis.
The presence of a full wafer dual-beam FIB on the process floor gave rise to an environment in which formerly segregated off-line lab and FAB tasks could be linked. One such idea involved a methodology for semi-automated defect targeting based on the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b79ac28d9a5018506df9ad344f9ce9ff
https://doi.org/10.31399/asm.cp.istfa2010p0113
https://doi.org/10.31399/asm.cp.istfa2010p0113
Publikováno v:
International Symposium for Testing and Failure Analysis.
The efficiency of Gas-Assisted Etching (GAE) and depositions performed using the Focused Ion Beam (FIB) technique is subject to numerous factors. Besides the wellknown primary parameters recommended by the FIB manufacturer (pixel spacing, dwell time,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::49449f3c4bdfa402c20e76254e3d366f
https://doi.org/10.31399/asm.cp.istfa2004p0527
https://doi.org/10.31399/asm.cp.istfa2004p0527
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