Digital electronics for inertial MEMS and space applications

Autor: Raphaël Lévy, Leopold Delahaye, Jean Guerard

Publikováno v: Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2018)
Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2018), May 2018, ROME, Italy. ⟨10.1109/DTIP.2018.8394236⟩

International audience; This paper presents an electronic platform for driving resonant MEMS in inertial sensors, and possibly other resonant or carrier based sensors. The architecture is fully integrated in a digital programmable device (FPGA), and

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::effd5296562e91c086da1db8ef6710ad
https://hal.archives-ouvertes.fr/hal-01993959