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Publikováno v:
Journal of Materials Research. 10:1086-1090
Thin films of Y-stabilized ZrO2 (YSZ) were deposited by RF diode sputtering on R-plane sapphire as a buffer layer for the deposition of YBa2Cu3O3 (YBCO). By increasing the partial pressure of oxygen in the sputter gas mixture from 20% to 50%, it was
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::204efcffb98680a542a87edc2a1bcb61
https://doi.org/10.1557/jmr.1995.1086
https://doi.org/10.1557/jmr.1995.1086
