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pro vyhledávání: '"A. Y. Gasilov"'
Publikováno v:
SPIE Proceedings.
Structures obtained using high-energy ion implantation into silicon are the novel object for optical diagnostics'. Implanted layers are characterized by significant spatial blur of optical transitions, contrary to the traditional sharp filmsubstrate
Autor:
Alexander N. Magunov, A. Y. Gasilov
Publikováno v:
SPIE Proceedings.
The automated optical system for the control of spatial distribution of the optical parameters of solids is developed. The possibilities of spectrophotometric method for detection of the low- contrast geometrical and physical inhomogeneities of diele