Optimization of a 65 nm CMOS imaging process for monolithic CMOS sensors for high energy physics

Autor: Rinella, G. Aglieri, Andronic, A, Antonelli, M, Baccomi, R, Ballabriga, R, Barbero, M, Barrillon, P, Baudot, J, Becht, P, Benotto, F, Beole, S, Bertolone, G, Besson, A, Bialas, W, Borghello, G, Braach, J, Buckland, M, Bugiel, S, Buschmann, E, Camerini, P, Campbell, M, Carnesecchi, F, Cecconi, L, Charbon, E, Chauhan, A, Colledani, C, Contin, G, Dannheim, D, Dort, K, de Melo, J, Deng, W, de Robertis, G, Di Mauro, A, Martin, A. Dorda, Dorokhov, A, Dorosz, P, Eberwein, G, Bitar, Z. El, Fang, X, Fenigstein, A, Ferrero, C, Fougeron, D, Gajanana, D, Goffe, M, Gonella, L, Grelli, A, Gromov, V, Habib, A, Haim, A, Hansen, K, Hasenbichler, J, Hillemanns, H, Hong, G.H, Hu, C, Isakov, A, Jaaskelainen, K, Junique, A, Kotliarov, A, Kremastiotis, I, Krizek, F, Kluge, A, Kluit, R, Kucharska, G, Kugathasan, T, Kwon, Y, La Rocca, P, Lautner, L, Leitao, P, Lim, B.-H, Loddo, F, Mager, M, Marras, D, Martinengo, P, Masciocchi, S, Mathew, S, Menzel, M.W, Morel, F, Mulyanto, B, Munker, M, Musa, L, Nakamura, M, Pangaud, P, Perciballi, S, Pham, H, Piro, F, Prino, F, Rachevski, S, Rebane, K, Reckleben, C, Reidt, F, Ricci, R, Russo, R, Sanna, I, Sarritzu, V, Savino, U, Schledewitz, D, Sedgwick, I, Senyukov, S, Snoeys, W, Soltveit, H.K, Sonneveld, J, Soudier, J, Stachel, J, Suzuki, M, Svihra, P, Suljic, M, Takahashi, N, Termo, G, Tiltmann, N, Toledano, E, Triffiro, A, Turcato, A, Usai, G, Valin, I, Villani, A, van Beelen, J.B, Vassilev, M.D, Vernieri, C, Vitkovskiy, A, Wu, Y, Yelkenci, A, Yuncu, A

Publikováno v: PoS

International audience; The long term goal of the CERN Experimental Physics Department R&D on monolithic sensorsis the development of sub-100nm CMOS sensors for high energy physics. The first technologyselected is the TPSCo 65nm CMOS imaging technolo

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3f5b9853ee2766115921315bac05da45
https://publikationen.bibliothek.kit.edu/1000159310/150824130