Zobrazeno 1 - 6
of 6
pro vyhledávání: '"A. S. Ryabyshenkov"'
Publikováno v:
Russian Microelectronics. 51:528-530
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a176c6706d1a1ac94a6697b7dc7ce65b
https://doi.org/10.1134/s1063739722070058
https://doi.org/10.1134/s1063739722070058
Publikováno v:
Kontrol'. Diagnostika. :24-29
The results of the assessment of the composition of emissions of pollutants during the process of epitaxy into the atmosphere are presented. Using the example of a typical model of the epitaxy process and instrumental measurements, it was found that
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d9e0aae434efe47248261ffbfebee885
https://doi.org/10.14489/td.2022.06.pp.024-029
https://doi.org/10.14489/td.2022.06.pp.024-029
Publikováno v:
2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
For implementing high-tech microelectronic production processes, particularly clean conditions are required as determined by technological microclimate. This paper analyzes the thermodynamic efficiency of the research system we make a balance for a s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a1361f47f22a98a96fd2782b044b3e6c
https://doi.org/10.1109/eiconrus.2019.8657071
https://doi.org/10.1109/eiconrus.2019.8657071
Publikováno v:
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
An air conditioning system plays an important role in maintaining the indoor air parameters (temperature, humidity, etc.) in a clean room of microelectronics. The purpose of the presented work is to study the heat and humidity characteristics in the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::21326704057be599b8389d0f4d3a7665
https://doi.org/10.1109/eiconrus.2018.8317490
https://doi.org/10.1109/eiconrus.2018.8317490
Publikováno v:
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
In the presented work, studies were carried out using the exergetic method of thermodynamic analysis of the air conditioning and air filtration system of clean rooms in microelectronics. Two models of the air-conditioning system were used: a direct-f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4304367835c6b2840767bc1436cdf88b
https://doi.org/10.1109/eiconrus.2018.8317494
https://doi.org/10.1109/eiconrus.2018.8317494
Publikováno v:
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
The air conditioning and filtration systems of clean rooms of microelectronics are designed to maintain a specified class of purity in them. The purpose of this work is to analyze the efficiency of air purification in the main elements of the system.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8d4237b5b2a300273072e5662b6282e1
https://doi.org/10.1109/eiconrus.2018.8317483
https://doi.org/10.1109/eiconrus.2018.8317483