Zobrazeno 1 - 10
of 36
pro vyhledávání: '"A. N. Gentselev"'
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 14:1403-1409
A new method for manufacturing a stamp or a mold, which differs from well-known LIGA technology, is described. They can be used to mold biochips of various plastics. A typical sequence of operations in LIGA technology is as follows: the formation of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5e299cd5347618640533b47ecc1d724c
https://doi.org/10.1134/s1027451020060300
https://doi.org/10.1134/s1027451020060300
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 14:862-865
A simple method for manufacturing silicon masks for deep X-ray lithography, conducted with the application of exposure radiation of the spectral range (0.5–7 A), is described. This method is based on planar silicon technology, which is widely used
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5db7950fa5601710bf298f750411fa9d
https://doi.org/10.1134/s1027451020040266
https://doi.org/10.1134/s1027451020040266
Autor:
F. N. Dultsev, D. S. Tanygina, B. G. Goldenberg, V. I. Kondratyev, Sergei A. Kuznetsov, A. N. Gentselev, A. G. Zelinsky
Publikováno v:
Optoelectronics, Instrumentation and Data Processing. 55:115-125
A method for fabricating high-pass terahertz quasi-optical filters in the form of thick (up to 1 mm in thickness) self-bearing copper microstructures of subwavelength topology is described. This method is based on forming a high-aspect-ratio mask of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca45048ab74a0324bfe9b82bd7146c3d
https://doi.org/10.3103/s875669901902002x
https://doi.org/10.3103/s875669901902002x
Publikováno v:
Optoelectronics, Instrumentation and Data Processing. 54:127-134
A method of fabrication of thick (~100 μm and more) resistive masks is described. These masks can be used for solving various engineering problems, e.g., for fabricating x-ray-absorbing topological patterns for LIGA masks, stamp microrelief, cast mo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ab957e0e76f4967af1bec9b665736b8
https://doi.org/10.3103/s8756699018020024
https://doi.org/10.3103/s8756699018020024
Publikováno v:
Optoelectronics, Instrumentation and Data Processing. 53:88-95
This paper describes a technological approach to the implementation of quasioptical high-pass subterahertz filters with the use of high-aspect pseudometallic structures. The approach is based on micropatterning a solid polymer layer of polymethylmeth
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cc898c46ff1ec535b79322a4345e5dc5
https://doi.org/10.3103/s8756699017010137
https://doi.org/10.3103/s8756699017010137
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 9:53-61
A simple technique for the production of lithography templates (lithography masks) with beryllium support membranes ∼50-100 μm in thickness with different types of masking coating (in the form of metallic layers produced through electroplating or
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d3f9f4b191e0bdfffee7bbb2f14244ad
https://doi.org/10.1134/s1027451015010085
https://doi.org/10.1134/s1027451015010085
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 7:1261-1269
A simple fabrication technology of hard X-ray masks with thin (50–150μm thick) X-ray transparent bearing membranes made of a new material, i.e., polymerized epoxy resin with graphite filler (hereafter, epoxygraphite), is described. The first resul
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::959264cd10b5fd0b3dece02f04d600aa
https://doi.org/10.1134/s1027451013130065
https://doi.org/10.1134/s1027451013130065
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 6:12-18
Differential scanning calorimetry and thermogravimetric analysis results for polymethyl methacrylate (PMMA, monomer with the atomic formula C5H8O2) samples, extensively used as an X-ray resist, are presented. The size distribution of aerosol particle
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::944b7998b50904eea079d7276366ee04
https://doi.org/10.1134/s1027451012010089
https://doi.org/10.1134/s1027451012010089
Autor:
A. N. Gentselev, B. G. Goldenberg, A. G. Zelinskii, V. F. Pindyurin, V. I. Kondrat’ev, S. K. Golubtsov
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 5:725-729
The first results of using manufactured available graphite foil as a material for supporting membranes in X-ray LIGA masks are presented, and a comparison of them with analogues is carried out.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e46b200a2089bc51a62725c3630559a3
https://doi.org/10.1134/s1027451011020091
https://doi.org/10.1134/s1027451011020091
Autor:
V. V. Lyakh, A. N. Gentselev, Valery F. Pindyurin, E. V. Petrova, V. S. Eliseev, L. A. Mezentseva, V. I. Kondrat’ev, B. G. Goldenberg
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 1:307-311
We consider a technique for manufacturing LIGA x-ray masks based on direct formation of a deep pattern topology of the mask by an x-ray microbeam. This technique does not require an intermediate mask, which strongly simplifies manufacturing and reduc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::791cea841a066a79c92204f390761605
https://doi.org/10.1134/s1027451007030147
https://doi.org/10.1134/s1027451007030147