Zobrazeno 1 - 10
of 33
pro vyhledávání: '"A. N. Genkin"'
Publikováno v:
Polymer Science Series A. 55:218-224
The effect of the 2′-(3-trifluoromethyl-2,2,3-trifluorocyclobutyl)ethyl radical in fluorosiloxane on the thermodynamics of dissolution of various low-molecular-mass compounds in this polymer is studied via inverse gas chromatography. The activity c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6ebd0c7ccd4ba82017fe100d5938ee87
https://doi.org/10.1134/s0965545x13040019
https://doi.org/10.1134/s0965545x13040019
Publikováno v:
Polymer Science Series A. 52:919-929
Samples of ethyl esters of perfluorinated acids based on hexafluoropropene oxide oligomers with molecular masses of 2000, 3100, and 4500 are used as stationary phases, and their interactions with low-molecular-mass compounds (sorbates) of different n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1cba0c993e84b4d7fed4d3d66cbb1243
https://doi.org/10.1134/s0965545x10090075
https://doi.org/10.1134/s0965545x10090075
Autor:
V. N. Genkin, Yu. G. Tynnikov
Publikováno v:
Technical Physics Letters. 26:1102-1104
The possible energy contributions to a gas flow, achievable under the blocking conditions, were determined in a quasi-one-dimensional approximation. The features of gas dynamics in flow reactors are considered and the conditions for obtaining various
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f8f096b33a4b5747bbd10954be44ebba
https://doi.org/10.1134/1.1337267
https://doi.org/10.1134/1.1337267
Publikováno v:
Russian Journal of General Chemistry. 81:783-784
For the successful use of these compounds in the modern membrane, catalytic, and other advanced technologies synthetic methods are required, which allow a consecutive utilization of the reactivity of sulfofluoride and fluorocarbonyl functions. In par
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::971b3c30c46ce5a1a14ed713e410ff05
https://doi.org/10.1134/s1070363211040323
https://doi.org/10.1134/s1070363211040323
Autor:
Vladimir N. Genkin
Publikováno v:
Advances in Resist Technology and Processing XI.
The chemical amplified resists are a good way of the solution of the X-ray, e-beam and DUV resist sensitivity problem. The difficulties of this way are connected with a high temperature diffusion during the process of the chemical amplification [1] (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5908af96f066772b7b2c90c6b93946b4
https://doi.org/10.1117/12.175351
https://doi.org/10.1117/12.175351
Autor:
M. Y. Myl'nikov, Vladimir N. Genkin
Publikováno v:
Advances in Resist Technology and Processing XI.
The development processes in microlithography consist in removing of exposure region with rate V exceeding the dissolution rate of unexposed regions. The technology characteristics of the resists are the contrast, the sensitivity and the resolution.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0560e2cefc89c97d3e55eb221d5f1f67
https://doi.org/10.1117/12.175387
https://doi.org/10.1117/12.175387
Autor:
M. Y. Myl'nikov, Vladimir N. Genkin
Publikováno v:
Advances in Resist Technology and Processing X.
In the fabrication of integrated circuits (IC) the solubility dependence of a polymer on its macromolecular length is used. The development process is multistage and involves series thicknesses just as in photo and plasma etching. In lithography this
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d15b2cf461f5458a0ce5ee28b16cf9e6
https://doi.org/10.1117/12.154786
https://doi.org/10.1117/12.154786
Autor:
G. P. Bobilkov, Vladimir N. Genkin
Publikováno v:
SPIE Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5045f4df0c549b531aa6709a63c406a4
https://doi.org/10.1117/12.48140
https://doi.org/10.1117/12.48140
Autor:
V. G. Kurin, A. V. Okomel’kov, Alexander A. Andronov, I. A. Shereshevsky, Vladimir N. Genkin, Mark Ghinovker, I. M. Nefedov
Publikováno v:
SPIE Proceedings.
Dynamic processes in 1D superconducting superlattices (SSLs) with a period substantially higher than the coherence length are investigated theoretically. The dynamic resistive state and the nonlinear response to laser irradiation are studied. The res
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d21a996fcea0d829e3f3748089519ae1
https://doi.org/10.1117/12.24450
https://doi.org/10.1117/12.24450
Autor:
Vladimir N. Genkin
Publikováno v:
SPIE Proceedings.
Some aspects of photomodification of polymer glasses and their applicability for the tasks of Xray 1ithograph are discussed. 1. Modification of dielectrics in the fields smaller than the atomic ones results from the absorption of'' light which can be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e7656a00b4aacf5208d11cb9e73863a8
https://doi.org/10.1117/12.23704
https://doi.org/10.1117/12.23704