Zobrazeno 1 - 6
of 6
pro vyhledávání: '"A. L. Elbrecht"'
Autor:
Andrea Cavallo, Silvio Mollo, A. L. Elbrecht, Gianluca Iezzi, Francesco Vetere, Valeria Misiti, M. Davis
Glass stability (GS) indicates the glass reluctance or ability to crystallise upon heating and it can be characterised by several methods and parameters. GS is frequently used to retrieve glass-forming ability (GFA) of corresponding liquids: the like
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6ace9736e31fb43d6da55a424dedfe57
http://hdl.handle.net/11573/1018436
http://hdl.handle.net/11573/1018436
Autor:
L Elbrecht, J Binder
Publikováno v:
Journal of Micromechanics and Microengineering. 9:130-133
Within this paper, the repeatability of the mechanical properties of thin polysilicon films is discussed. The film thickness, mechanical stress and Young's modulus are investigated with respect to on-wafer, wafer-to-wafer and run-to-run repeatability
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a2bc33d8242172ac16f09b912f617022
https://doi.org/10.1088/0960-1317/9/2/007
https://doi.org/10.1088/0960-1317/9/2/007
Publikováno v:
Journal of Micromechanics and Microengineering. 7:151-154
Stress measurement techniques using micromachined structures are compared with the wafer curvature technique. Buckling bridges and rotating indicator structures are simulated, designed and fabricated using thin polysilicon films. Stress ranging from
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cc5951982b011df0bf780d6288996dd8
https://doi.org/10.1088/0960-1317/7/3/019
https://doi.org/10.1088/0960-1317/7/3/019
Publikováno v:
Sensors and Actuators A: Physical. 61:374-378
Stress in highly phosphorus-doped polysilicon films for surface micromachining using diffusion doping with POCl3 as dopant source is investigated. The deposition temperature is varied in the range 565 to 620°C, and doping is done at 950 and 850°C,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e425b06147ff19da9bcab160aed8f829
https://doi.org/10.1016/s0924-4247(97)80292-0
https://doi.org/10.1016/s0924-4247(97)80292-0
Publikováno v:
2006 IEEE Ultrasonics Symposium.
Designing bulk acoustic wave resonators for RF filter applications is governed by the need for a high quality factor (Q-value), a large piezoelectric coupling and the purity of the main resonance. The most powerful method to suppress spurious modes i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0135697671e635fc1c19213c9228865
https://doi.org/10.1109/ultsym.2006.122
https://doi.org/10.1109/ultsym.2006.122
Publikováno v:
Journal of Applied Physics. 77:2828-2830
We measured the in‐plane effective mass for electrons in multiquantum wells in InGaAs/InP by the Shubnikov–de Haas effect. We varied the well width from 8.6 down to 2.3 nm where the enhancement of the effective mass is predicted to be very pronou
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f8b1de80a82496410d0716982ffcd690
https://doi.org/10.1063/1.358694
https://doi.org/10.1063/1.358694