Zobrazeno 1 - 1
of 1
pro vyhledávání: '"A. I. Lougovik"'
Publikováno v:
Nauka i Tehnika, Vol 0, Iss 1, Pp 32-38 (2009)
The paper considers possibilities to apply magnetic-abrasive machining method as one of the final operations for polishing flat surfaces of silicon wafers. A mathematical model has been built that reflects main principles of tool-work-piece interacti
Externí odkaz:
https://doaj.org/article/d72dc00ce48b473c9a88dc2106135ee0