Zobrazeno 1 - 1
of 1
pro vyhledávání: '"A. B. Fimin"'
Autor:
S. A. Gurin, K. O. Nikolaev, A. B. Fimin, D. V. Artamonov, E. A. Pecherskaya, Yuliya V. Shepeleva
Publikováno v:
Journal of Physics: Conference Series. 1410:012021
The results of the study of the technological regimes of the formation of a microcantilever beam of layered heterostructures based on the integration of smart material and silicon carbide are presented. Layers of silicon dioxide (SiO2), silicon nitri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::223a59a13608b8fa58ef2a888aa2f00d
https://doi.org/10.1088/1742-6596/1410/1/012021
https://doi.org/10.1088/1742-6596/1410/1/012021
