Zobrazeno 1 - 2
of 2
pro vyhledávání: '"A. A. Razhavski"'
Autor:
V. V. Volodko, A. G. Golovkin, L. I. Kaganov, A. M. Shterenberg, V. B. Oparin, L. M. Blinov, A. A. Razhavski, V. I. Zyn
Publikováno v:
Plasma Chemistry and Plasma Processing. 18:509-533
Time-resolved mass spectrometry was used for analysis of the plasma reactions in radio frequency (RF) SiCl 4 and SiCl 4 −O 2 discharges as functions of starting partial pressure and electrical power. Molecular concentrations of the reactants and pr
Autor:
Blinov, L., Golovkin, A., Kaganov, L., Oparin, V., Razhavski, A., Shterenberg, A., Volodko, V., Zyn, V.
Publikováno v:
Plasma Chemistry & Plasma Processing; Dec1998, Vol. 18 Issue 4, p509-533, 25p