Zobrazeno 1 - 4
of 4
pro vyhledávání: '"A. A. Razhavski"'
Autor:
V. V. Volodko, A. G. Golovkin, L. I. Kaganov, A. M. Shterenberg, V. B. Oparin, L. M. Blinov, A. A. Razhavski, V. I. Zyn
Publikováno v:
Plasma Chemistry and Plasma Processing. 18:509-533
Time-resolved mass spectrometry was used for analysis of the plasma reactions in radio frequency (RF) SiCl 4 and SiCl 4 −O 2 discharges as functions of starting partial pressure and electrical power. Molecular concentrations of the reactants and pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17de2eb529dcf055390b91b605160005
https://doi.org/10.1023/a:1021811316740
https://doi.org/10.1023/a:1021811316740
Autor:
Blinov, L., Golovkin, A., Kaganov, L., Oparin, V., Razhavski, A., Shterenberg, A., Volodko, V., Zyn, V.
Publikováno v:
Plasma Chemistry & Plasma Processing; Dec1998, Vol. 18 Issue 4, p509-533, 25p
Publikováno v:
Journal of Chemical Physics; 8/1/2005, Vol. 123 Issue 5, p054313, 8p, 2 Charts, 5 Graphs
Publikováno v:
European Physical Journal D (EPJ D); May2008, Vol. 47 Issue 3, p289-293, 5p, 2 Charts, 4 Graphs