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Autor:
N. N. Nevirkovets, N. M. Chernetskaya, A. A. Belogurov, A. N. Bocharov, A. V. Yakimova, D. V. Kostygov, A. A. Mihteeva, I. V. Lemko, Ya. V. Belyaev
Publikováno v:
2018 25th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS).
Stages of design of a sensing element with an electrode structure, and an integrated circuit of a micromechanical accelerometer, starting from a system model and a circuit level, and ending with the development of topology, are considered. The result