Výsledky vyhledávání - "A. A. Khabir'yanova"

Akademický článek

Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions.

Autor: Fairushin, I. I.^1,2,3 (AUTHOR) fairushin_ilnaz@mail.ru, Shemakhin, A. Yu.¹ (AUTHOR), Khabir'yanova, A. A.⁴ (AUTHOR)

Publikováno v: High Energy Chemistry. Sep2021, Vol. 55 Issue 5, p399-401. 3p.

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Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions

Autor: I. I. Fairushin, A. Yu Shemakhin, A. A. Khabir’yanova

Publikováno v: High Energy Chemistry. 55:399-401

Using the molecular dynamics method, the sputtering of a copper target and the subsequent formation of a copper nanofilm on a silicon substrate has been modeled. The process parameters corresponded to the conditions in low-pressure gas-discharge plas

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6e5b23f84cf486df66111e6dca8cf896
https://doi.org/10.1134/s0018143921050039

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