Zobrazeno 1 - 2
of 2
pro vyhledávání: '"A V Kotosonova"'
Autor:
A S, Kolomiytsev, A L, Gromov, O I, Il'in, I V, Panchenko, A V, Kotosonova, A, Ballouk, D, Rodriguez, O A, Ageev
Publikováno v:
Ultramicroscopy. 234:113481
At present, the focused ion beam method is an effective technique for nanoscale profiling of a solid surface and prototyping of micro- and nanoscale structures. The article reveals the results of experimental studies on improving the accuracy and res
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2a64415982dfcc3f24679f101effefb2
https://doi.org/10.1016/j.ultramic.2022.113481
https://doi.org/10.1016/j.ultramic.2022.113481
Publikováno v:
Journal of Physics: Conference Series. 2086:012204
In this work, we carried out an investigation of commercial atomic force microscope (AFM) probes for contact and semi-contact modes, which were modified by focused ion beam (FIB). This method was used to modify the original tip shape of silicon AFM p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::be84156cc0ab3c4303289b300701d8c1
https://doi.org/10.1088/1742-6596/2086/1/012204
https://doi.org/10.1088/1742-6596/2086/1/012204