Zobrazeno 1 - 10
of 57
pro vyhledávání: '"A E, Yakshin"'
Publikováno v:
AIP Advances, Vol 10, Iss 4, Pp 045305-045305-8 (2020)
X-ray W/B multilayer mirrors with a period of 2.5 nm were deposited by dc magnetron sputtering and studied in comparison with W/Si multilayer systems of the same period. Transmission electron microscopy, grazing incidence X-Ray reflectivity, and x-ra
Externí odkaz:
https://doaj.org/article/130623fdc8c448b48ca6ec4de081e1c2
Publikováno v:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 41(4):043203. American Institute of Physics
We investigate the use of Low Energy Ion Scattering (LEIS) to characterize buried interfaces of ultra-thin films. LEIS spectra contain depth-resolved information in the so-called sub-surface signal. However, the exact correlation between the sub-surf
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::738733cd169b8ee0a9b2a9b24ab511bc
https://doi.org/10.1116/6.0002567
https://doi.org/10.1116/6.0002567
Autor:
Philip Lucke, Mohammadreza Nematollahi, Muharrem Bayraktar, Andrey E. Yakshin, Johan E. ten Elshof, Fred Bijkerk
Publikováno v:
ACS Omega, 7(26), 22210-22220. American Chemical Society
ACS Omega, 7(26), 1110-2220. American Chemical Society
ACS Omega, 7(26), 1110-2220. American Chemical Society
The microstructure of the PbZr0.52Ti0.48O3 (PZT) films is known to influence the ferroelectric properties, but so far mainly the effect of the deposition conditions of the PZT has been investigated. To our knowledge, the influence of the underlying e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::774d602b3712e649369019aaa43e07fa
https://doi.org/10.1021/acsomega.2c00815
https://doi.org/10.1021/acsomega.2c00815
Publikováno v:
AIP Advances, Vol 6, Iss 11, Pp 115117-115117-9 (2016)
We investigate a hybrid thin film deposition procedure that significantly enhances reflectivity of La/B based nanoscale multilayer structures to be used as Extreme UV mirrors at 6.7 nm wavelength and beyond. We have analyzed the La-nitridation proces
Externí odkaz:
https://doaj.org/article/b924e5cf5fc94baf84aab2146e4d6232
Publikováno v:
Journal of nanoscience and nanotechnology. 19(1)
We studied a possibility of fabricating LaN/B grazing incidence multilayer mirrors for 6.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::b9b725036ae0673b7b7d75c679a128fd
https://pubmed.ncbi.nlm.nih.gov/30327073
https://pubmed.ncbi.nlm.nih.gov/30327073
Autor:
Oleksandr Antonov, Evert Pieter Houwman, Huiyu Yuan, Eric Louis, Andrey E. Yakshin, Fred Bijkerk, Benjamin J. Wylie-van Eerd, Guus Rijnders
Publikováno v:
Advances in X-Ray/EUV Optics and Components XI.
Publisher’s Note: This conference presentation, originally published on 2 November 2016, was withdrawn per author request.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5fac06fae5717422a61e1c96a6435e43
https://doi.org/10.1117/12.2239018
https://doi.org/10.1117/12.2239018
Publikováno v:
Applied Surface Science, 257, 2707-2711
We present a low temperature diffusion study on the formation of intermixing zones between periodic, nanometer thick films consisting of Mo and Si. An in-situ X-ray diffraction method at pm-accuracy was developed, including a model that explains the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::31338e2dff0855f89fbb961c1d3e5866
https://doi.org/10.1016/j.apsusc.2010.10.049
https://doi.org/10.1016/j.apsusc.2010.10.049
Publikováno v:
Progress in Surface Science, 86, 255-294
Progress in surface science, 86(11-12), 255-294. Elsevier
Progress in surface science, 86(11-12), 255-294. Elsevier
An overview is given of the progress in thin film and surface physics involved in multilayered systems with nanometer scale periodicity. When properly engineered, these enable the synthesis of reflective optics for the Extreme UV wavelength range. De
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4cd198dcf38abe398a5fd43da30810b8
https://doi.org/10.1016/j.progsurf.2011.08.001
https://doi.org/10.1016/j.progsurf.2011.08.001
Autor:
Andrey E. Yakshin, S. Dobrovolskiy, Eric Louis, Frederik Bijkerk, J. Verhoeven, Frans D. Tichelaar
Publikováno v:
Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atoms, 268(6), 560-567. Elsevier
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 268, 560-567
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 268, 560-567
Si/SiC multilayer systems for XUV reflection optics with a periodicity of 10-20 nm were produced by sequential deposition of Si and implantation of 1 key CHx+ ions. Only about 3% of the implanted carbon was transferred into the SIC, with a thin, 0.5-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5c7b33f15641b00c98b6164a007ba8f1
https://doi.org/10.1016/j.nimb.2009.12.022
https://doi.org/10.1016/j.nimb.2009.12.022
Publikováno v:
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 222, 484-490
The impact of energetic ions during fabrication of W/Si multilayers may result in interface layers with a gradually changing concentration, notably in the W-on-Si interface layer. This process may be employed to deliberately form a multilayer system
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cf6cdf20ab7607f2719bd4a04414dd86
https://doi.org/10.1016/j.nimb.2004.03.006
https://doi.org/10.1016/j.nimb.2004.03.006