Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging

Autor: Tilo Baumbach, Petr Mikulík, Dušan Korytár, Petra Pernot, Lukas Helfen, Nicola Verdi, C. Ferrari, D. Lübbert

Publikováno v: Journal of applied crystallography 38 (2005): 91–96. doi:10.1107/S0021889804028195
info:cnr-pdr/source/autori:Lübbert D., Ferrari C., Mikulík P., Pernot P., Helfen L., Verdi N., Korytár D. and Baumbach T./titolo:Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging/doi:10.1107%2FS0021889804028195/rivista:Journal of applied crystallography/anno:2005/pagina_da:91/pagina_a:96/intervallo_pagine:91–96/volume:38

The method called `rocking-curve imaging' (RCI) has recently been developed to visualize lattice imperfections in large crystals such as semiconductor wafers with high spatial resolution. The method is based on a combination of X-ray rocking-curve an

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https://publica.fraunhofer.de/handle/publica/209638