Zobrazeno 1 - 4
of 4
pro vyhledávání: '"齐克奇 Qi Ke-qi"'
Publikováno v:
Chinese Optics. 13:344-353
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a208da1f53c05c3025925cb6c557f2a8
https://doi.org/10.3788/co.20201302.0344
https://doi.org/10.3788/co.20201302.0344
Publikováno v:
Chinese Optics. 12:455-462
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9ecb9cd0116ae6a60f278404ca2b9541
https://doi.org/10.3788/co.20191203.0455
https://doi.org/10.3788/co.20191203.0455
Autor:
齐克奇 Qi Ke-qi, 向阳 Xiang Yang
Publikováno v:
ACTA PHOTONICA SINICA. 41:1452-1455
To meet the requirement of phase-shifting measurement of the wavefront aberration detecting stage for lithographic projection objective,based on theory of Shearing Interferometry,a phase-shifting device is designed.Bridge amplification mechanism is a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e242efdbcaca70af31c76a6937a32677
https://doi.org/10.3788/gzxb20124112.1452
https://doi.org/10.3788/gzxb20124112.1452
Publikováno v:
Chinese Journal of Lasers. 45:0504002
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38622e3daf1081ef766a8c3c36014fc7
https://doi.org/10.3788/cjl201845.0504002
https://doi.org/10.3788/cjl201845.0504002