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Autor:
Sung-Wen Huang Chen, 黃陳嵩文
104
The control of the bonding between Silicon and hydrogen atoms, the Si-H composition ratio, reduction of the impurity doping and defects are the key factors to fabricate good quality hydrogenated amorphous silicon (a-Si:H) film In this thesis
The control of the bonding between Silicon and hydrogen atoms, the Si-H composition ratio, reduction of the impurity doping and defects are the key factors to fabricate good quality hydrogenated amorphous silicon (a-Si:H) film In this thesis
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/79816095968552794718
