Zobrazeno 1 - 1
of 1
pro vyhledávání: '"陳盟偉"'
Autor:
Meng-Wei Chen, 陳盟偉
100
This paper aims at exploring the pulsed DC magnetron sputtering system in disposition application of titanium nitride film. In addition, the Taguchi experiments have been used to extract the optimized parameters of titanium nitride film, and
This paper aims at exploring the pulsed DC magnetron sputtering system in disposition application of titanium nitride film. In addition, the Taguchi experiments have been used to extract the optimized parameters of titanium nitride film, and
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/31638852319638986854