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pro vyhledávání: '"门玉涛 Men Yu-tao"'
Autor:
王世斌 Wang Shi-bin, 门玉涛 Men Yu-tao, 贾海坤 Jia Hai-kun, 郭振山 Guo Zhen-shan, 何巍 He Wei, 李林安 Li Lin-an
Publikováno v:
Optics and Precision Engineering. 19:2293-2299
This paper presents a basic structure combined with a film and a substrate to investigate the damage and deformation of thin films and to predict the life time of MEMS.The bifurcation and fracture of thin films under a tensive load were determined by