Zobrazeno 1 - 3
of 3
pro vyhledávání: '"郭勇君 Guo Yong-jun"'
Publikováno v:
Optics and Precision Engineering. 22:2998-3003
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca462531e31160bcbd3314c1d939ec69
https://doi.org/10.3788/ope.20142211.2998
https://doi.org/10.3788/ope.20142211.2998
Publikováno v:
Optics and Precision Engineering. 21:1531-1536
A fabrication method combining anisotropic wet etching with isotropic wet etching process is proposed to obtain silicon-based three-dimensional curved rotary profile.In the isotropic etching process,the corrosion rate increases exponentially with the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::18fec4104339ad42680dad3ee0ae9e86
https://doi.org/10.3788/ope.20132106.1531
https://doi.org/10.3788/ope.20132106.1531
Publikováno v:
Acta Optica Sinica. 34:0123002
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76206f088b25c1ad485dbbd9a5b6b841
https://doi.org/10.3788/aos201434.0123002
https://doi.org/10.3788/aos201434.0123002