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In this work, we try to fabricate single microlens and microlens arrays on PMMA by using an excimer laser with well designed metal masks. First, we measured the etching rates for various mask opening areas and fluences to obtain the dependenc
In this work, we try to fabricate single microlens and microlens arrays on PMMA by using an excimer laser with well designed metal masks. First, we measured the etching rates for various mask opening areas and fluences to obtain the dependenc
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/49142686477318607648
