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This thesis presents the study on the resonant behavior of the shrunken devices of micro-electromechanical system (MEMS). We design two types of MEMS suspending beam, “cantilever and double-clamped beams”. We have developed a fabrication
This thesis presents the study on the resonant behavior of the shrunken devices of micro-electromechanical system (MEMS). We design two types of MEMS suspending beam, “cantilever and double-clamped beams”. We have developed a fabrication
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/01839847867871407978
