Zobrazeno 1 - 4
of 4
pro vyhledávání: '"谢锦辉"'
Autor:
谢锦辉
Publikováno v:
Tongxin xuebao, Vol (1994)
Externí odkaz:
https://doaj.org/article/a533fffa18f448c9a23035c74a10d4ac
Publikováno v:
Polymer Materials Science & Engineering; Jul2023, Vol. 39 Issue 7, p64-74, 11p
Publikováno v:
Polymer Materials Science & Engineering; 2023, Vol. 39 Issue 5, p68-83, 10p
Autor:
Chin-Hui Hsieh, 謝錦輝
98
This thesis applies robust control to a two-axis piezoelectric nanopositioning stage. As semiconductor technology develops, the precision requirement for positioning platforms is increasingly stringent. Because the traditional mechanical tran
This thesis applies robust control to a two-axis piezoelectric nanopositioning stage. As semiconductor technology develops, the precision requirement for positioning platforms is increasingly stringent. Because the traditional mechanical tran
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/07685060414972011135
