Zobrazeno 1 - 3
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pro vyhledávání: '"谢德明"'
Publikováno v:
Acta Materiae Compositae Sinica; Dec2023, Vol. 40 Issue 12, p6766-6773, 8p
Autor:
Hsieh, Der-Ming, 謝德明
86
Laser annealing has found many applications in industry. One of the applications is to restore the damage done to the silicon wafer during ion implantation of the dopants. Comparing with the other annealing method (such as furnace), we find t
Laser annealing has found many applications in industry. One of the applications is to restore the damage done to the silicon wafer during ion implantation of the dopants. Comparing with the other annealing method (such as furnace), we find t
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/29956639326006108725
