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Carbon nanotubes were synthesized in a mixture of methane and hydrogen as precursors by the microwave plasma enhanced chemical vapor deposition (MPECVD) system equipped with a dc bias to the substrate of silicon. By varying carbon nanotubes f
Carbon nanotubes were synthesized in a mixture of methane and hydrogen as precursors by the microwave plasma enhanced chemical vapor deposition (MPECVD) system equipped with a dc bias to the substrate of silicon. By varying carbon nanotubes f
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/33267030348631901810