Zobrazeno 1 - 3
of 3
pro vyhledávání: '"蔡孟浩"'
Publikováno v:
Chinese Journal of Biochemistry & Molecular Biology. Oct2024, Vol. 40 Issue 10, p1471-1478. 8p.
Autor:
Meng-Hao Tsai, 蔡孟浩
104
An in-situ monitoring system for Metal Organic Chemical Vapor Deposition (MOCVD) process is presented. The proposed monitoring system consisted of the modules of growth-rate and temperature, which is able to precisely measure the growth rate
An in-situ monitoring system for Metal Organic Chemical Vapor Deposition (MOCVD) process is presented. The proposed monitoring system consisted of the modules of growth-rate and temperature, which is able to precisely measure the growth rate
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/03440149853582012539
Publikováno v:
Journal of East China University of Science & Technology; 2023, Vol. 49 Issue 5, p702-711, 10p