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In this thesis, the performance improvement of the sub-micron LTPS p-type TFTs with the fluorine implantation treatment was investigated. The method of this thesis was that using the pad oxide prevents the damage of the channel surface while
In this thesis, the performance improvement of the sub-micron LTPS p-type TFTs with the fluorine implantation treatment was investigated. The method of this thesis was that using the pad oxide prevents the damage of the channel surface while
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/a6km62
