Zobrazeno 1 - 1
of 1
pro vyhledávání: '"申雪飞 Shen Xue-fei"'
Publikováno v:
Optics and Precision Engineering. 20:31-37
With the aim to lower the surface roughnesses of etched samples and the etching threshold fluence of a direct laser irradiation source and to raise the yield of micro-optical elements,a laser induced backside dry etching technique with the assistance
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a3f339a3caf5841548d9b8f39f28ec8e
https://doi.org/10.3788/ope.20122001.0031
https://doi.org/10.3788/ope.20122001.0031
