Zobrazeno 1 - 1
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pro vyhledávání: '"温度一致性"'
Publikováno v:
Xibei Gongye Daxue Xuebao, Vol 42, Iss 5, Pp 939-947 (2024)
In order to improve the processing yield of large-size wafers, the partition control method of silicon carbide wafer heating plate heated by metal oxide conductive coating is studied, and a 4-partition temperature control system based on Smith fuzzy
Externí odkaz:
https://doaj.org/article/3f8166b6d08645378d50b860253ade6d
