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pro vyhledávání: '"洪政男"'
Autor:
Hung, Jeng-Nan, 洪政男
100
In light of the rapid advancement in IC/MEMS/NEMS technology, the reliability is an essential factor for a successful microdevice product. However, the reliable application of these devices often depends on the fatigue of their microstructur
In light of the rapid advancement in IC/MEMS/NEMS technology, the reliability is an essential factor for a successful microdevice product. However, the reliable application of these devices often depends on the fatigue of their microstructur
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/88312660424363932960
Autor:
Jeng-Nan Hung, 洪政男
92
Devices of Micro-electro-mechanical System (MEMS) include microactuators, microsensors and their transducers. Where, the microactuators drives the whole system and enables the system to operate effectively. This thesis uses polysilicon as the
Devices of Micro-electro-mechanical System (MEMS) include microactuators, microsensors and their transducers. Where, the microactuators drives the whole system and enables the system to operate effectively. This thesis uses polysilicon as the
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/59482337235612062478