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pro vyhledávání: '"汤皎宁 Tang Jiao-ning"'
Autor:
周 艳 Zhou Yan, 汤皎宁 Tang Jiao-ning, 邹春莉 Zou Chun-li, 潘国顺 Pan Guo-shun, 史晓磊 Shi Xiao-lei, 龚 桦 Gong Hua
Publikováno v:
Optics and Precision Engineering. 25:100-106
Surface quality of LED sapphire substrate influences epitaxy quality greatly, and further influences the performance of LED devices. After the chemical mechanical polishing (CMP) of slurry including AlO abrasive and SiO abrasive of sapphire grinding
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7e2c9fa0f4103ddbcef899a5b9aee2b8
https://doi.org/10.3788/ope.20172501.0100
https://doi.org/10.3788/ope.20172501.0100
