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pro vyhledávání: '"毛耀霆"'
Autor:
Yao-Ting Mao, 毛耀霆
94
This thesis addresses the 3-dimensional scanning probe microscope (SPM) lithography. Previous researches have shown that servo control imposes significant effect on the behavior of the piezo-electric actuators used in the SPM system; however,
This thesis addresses the 3-dimensional scanning probe microscope (SPM) lithography. Previous researches have shown that servo control imposes significant effect on the behavior of the piezo-electric actuators used in the SPM system; however,
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/88218108568555732317
