Zobrazeno 1 - 1
of 1
pro vyhledávání: '"毛威智"'
Autor:
Mao, Wei Jhih, 毛威智
104
This study presents two different CMOS-MEMS microphone designs with serpentine spring structure. The serpentine spring structure not only can decrease the stiffness of diaphragm but also can change the diaphragm motion into piston-type movem
This study presents two different CMOS-MEMS microphone designs with serpentine spring structure. The serpentine spring structure not only can decrease the stiffness of diaphragm but also can change the diaphragm motion into piston-type movem
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/13312543011966624441
