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pro vyhledávání: '"楊秉益"'
Autor:
Ping-Yi Yang, 楊秉益
105
Effects of different radio-frequency (rf) powers on the properties of carbon films prepared by plasma enhanced chemical vapor deposition using nitrogen/ethane (N2/C2H6) mixtures were investigated. Five kinds of carbon thin films were prepare
Effects of different radio-frequency (rf) powers on the properties of carbon films prepared by plasma enhanced chemical vapor deposition using nitrogen/ethane (N2/C2H6) mixtures were investigated. Five kinds of carbon thin films were prepare
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/33408056291489759889
