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pro vyhledávání: '"林佑整"'
Autor:
Yu-Cheng Lin, 林佑整
95
The purpose of this study is to develop a large measurement range ultra precision with topography with advantages of low cost and high precision. The measurement system is consisted of Piezo Ceramic Linear Moter (PCLM), X/Y axis microstep mot
The purpose of this study is to develop a large measurement range ultra precision with topography with advantages of low cost and high precision. The measurement system is consisted of Piezo Ceramic Linear Moter (PCLM), X/Y axis microstep mot
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/44836967883117797787
