Zobrazeno 1 - 2
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pro vyhledávání: '"林云生 Lin Yun-sheng"'
Publikováno v:
Optics and Precision Engineering. 19:2651-2656
As current high-speed scanning Atomic Force Microscope(AFM) is mainly designed for the biological imaging application and its scanning speed and scanning range should be improved,a novel high speed AFM was designed.Based on the flexure guide structur
Publikováno v:
Optics and Precision Engineering. 19:836-843
In order to expand the application scope of Atomic Force Microscopes(AFMs),a large-range and high-speed AFM was developed.A feed-forward and feed-back algorithm is proposed to deal with the Z-control of the AFM.The feed-forward controller includes an