Zobrazeno 1 - 2
of 2
pro vyhledávání: '"李正勳 Li Zheng-xun"'
Autor:
李正勳 Li Zheng-xun, 张光明 Zhang Guang-ming, 刘杰 Liu Jie, 宋泳珍 Song Yong-zhen, 徐守宇 Xu Shou-yu, 吴成龙 Wu Cheng-long, 李伟 Li Wei, 曲泓铭 Qu Hong-ming, 郑云友 Zheng Yun-you
Publikováno v:
Chinese Journal of Liquid Crystals and Displays. 28:224-227
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9ff0b4c52a2e5712640f33a531c8ca77
https://doi.org/10.3788/yjyxs20132802.0224
https://doi.org/10.3788/yjyxs20132802.0224
Autor:
李伟 Li Wei, 吴成龙 Wu Cheng-long, 王文青 Wang Wen-qing, 王亮 Wang Liang, 宋泳珍 Song Yong-zhen, 李鑫 Li Xin, 李正勳 Li Zheng-xun, 郑云友 Zheng Yun-you
Publikováno v:
Chinese Journal of Liquid Crystals and Displays. 27:204-207
The effects on the PR ashing rate,uniformity and H/V ratio were researched in process of ECCP dry etch model when the gas flow rate and pressure changed.The results show that PR ashing rate and the value of H/V would enlarge with the increasing press
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e3674eee5fd24cc8abe555b25f14d2bb
https://doi.org/10.3788/yjyxs20122702.0204
https://doi.org/10.3788/yjyxs20122702.0204