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pro vyhledávání: '"李暉成"'
Autor:
Huei-Cheng Li, 李暉成
100
Effects of the C2H4/(C2H4+NH3) ratios on the properties of thermal chemical vapor deposition (CVD) carbon films are investigated. Five kinds of carbon films are deposited with the C2H4/(C2H4+NH3) ratio of 60, 70, 80, 90, and 100 %. The depos
Effects of the C2H4/(C2H4+NH3) ratios on the properties of thermal chemical vapor deposition (CVD) carbon films are investigated. Five kinds of carbon films are deposited with the C2H4/(C2H4+NH3) ratio of 60, 70, 80, 90, and 100 %. The depos
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/61153121190364291527
