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pro vyhledávání: '"李健志"'
Autor:
Chien-Chih Lee, 李健志
95
The research grows titanium oxide TiO and TiO2 (generally called TiOx) with ultra high vacuum reactive magnetron sputtering titanium target in different O2/Ar flow ratio, and monitors the difference of plasma type with in-situ optical emissio
The research grows titanium oxide TiO and TiO2 (generally called TiOx) with ultra high vacuum reactive magnetron sputtering titanium target in different O2/Ar flow ratio, and monitors the difference of plasma type with in-situ optical emissio
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/09390942312117818093
