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pro vyhledávání: '"徐珮凱"'
Autor:
Pei-Kai Hsu, 徐珮凱
96
This study applies a novel fabrication process of molding stamper that combines anisotropic wet etching of silicon-on-insulator(SOI) wafers with electroforming to produce an accurate stamper. Because the geometry of the fabricated feature of
This study applies a novel fabrication process of molding stamper that combines anisotropic wet etching of silicon-on-insulator(SOI) wafers with electroforming to produce an accurate stamper. Because the geometry of the fabricated feature of
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/9jz38r
