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pro vyhledávání: '"岳东旭 Yue Dong-xu"'
Publikováno v:
Optics and Precision Engineering. 19:783-788
A nonlinear mechanical model for sub-micron cantilevers was analyzed in detail and its physical mechanism was researched to provide a theoretical basis for experiments.The electrostatical force was used to achieve the resonance state cantilever beams
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a450f17bc1410605b633de9d09021a3e
https://doi.org/10.3788/ope.20111904.0783
https://doi.org/10.3788/ope.20111904.0783
