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pro vyhledávání: '"周小为 Zhou Xiao-wei"'
Autor:
徐向东 Xu Xiang-dong, 洪义麟 Hong Yi-lin, 邱克强 Qiu Ke-qiang, 周小为 Zhou Xiao-wei, 刘颖 Liu Ying, 付绍军 Fu Shao-jun, 刘正坤 Liu Zheng-kun, 盛斌 Sheng Bin
Publikováno v:
Optics and Precision Engineering. 20:1676-1683
Ion beam etching technologies for developing large aperture Diffractive Optical Elements(DOEs) were reviewed.To meet the requirements of large aperture DOEs in high-power laser systems,an integrated graphite mask for ion beams and a multi-position et