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Publikováno v:
Feed Research. 2024, Vol. 47 Issue 14, p1-6. 6p.
Autor:
Yu-Kai Chou, 周于凱
102
AlCrSiTiVN multicomponent thin films were prepared on silicon and tungsten carbide samples using a cathodic arc deposition system. Ti60V40 and Cr60Al30Si10 cathodes were used for the deposition of AlCrSiTiV multicomponent thin films. By cont
AlCrSiTiVN multicomponent thin films were prepared on silicon and tungsten carbide samples using a cathodic arc deposition system. Ti60V40 and Cr60Al30Si10 cathodes were used for the deposition of AlCrSiTiV multicomponent thin films. By cont
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/bk7h3z
