Zobrazeno 1 - 10 of 23 pro vyhledávání: '"向阳 Xiang Yang"'
7
Phase-shifting technology of digital lateral shearing interferometer
Autor: 向阳 Xiang Yang, 何煦 He Xu
Publikováno v: Optics and Precision Engineering. 21:2244-2251
As the resolution,accuracy and other parameters of the phase-shifting unit in a phase-shifting lateral shearing interferometer will directly affect the test accuracy of wavefront aberration for a lithograph objective,a phase-shifting component with m
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7c0e7782d8f9e015c63a854ffa86ee47
https://doi.org/10.3788/ope.20132109.2244
Zobrazit plný text záznamu
8
Correction of image uniformity for imaging spectrometer
Autor: 张春雷 Zhang Chun-lei, 向阳 Xiang Yang
Publikováno v: Chinese Journal of Optics and Applied Optics. 6:584-590
To obtain a high quality image from the new type imaging spectrometer,the uniformity correction method for the image was studied according to the characteristics of the image.The new type imaging spectrometer was placed on the rotation stage to simul
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2e3663cc521212716a80941d41bea69f
https://doi.org/10.3788/co.20130604.0584
Zobrazit plný text záznamu
10
Development of Phase-shifting Device of Wavefront Aberration Detecting Stage for Lithographic Projection Objective
Autor: 齐克奇 Qi Ke-qi, 向阳 Xiang Yang
Publikováno v: ACTA PHOTONICA SINICA. 41:1452-1455
To meet the requirement of phase-shifting measurement of the wavefront aberration detecting stage for lithographic projection objective,based on theory of Shearing Interferometry,a phase-shifting device is designed.Bridge amplification mechanism is a
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e242efdbcaca70af31c76a6937a32677
https://doi.org/10.3788/gzxb20124112.1452
Zobrazit plný text záznamu

Vyhledávací nástroje:

Upřesnit hledání

Omezení vyhledávání
Plný text Recenzováno Digitální knihovna AV ČR
Zdroje